SCR based ESD protection of Output Drivers in EPI technologies avoiding competitive triggering

نویسندگان

  • Bart Keppens
  • Olivier Marichal
  • Benjamin Van Camp
چکیده

Self protective output drivers have been used extensively as an elegant solution against Electro Static Discharge. However, recent measurement data show unexpectedly low HBM and MM results in low resistive EPI technologies. The HBM-TLP correlation issue is investigated and a novel local parallel protection scheme for output drivers is presented, solving the competitive triggering issue using only a very small series (~10 Ohm) resistance without requiring the expensive Deep Nwell process step.

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تاریخ انتشار 2010